Advanced Defect Inspection Techniques For nFET And pFET Defectivity At 7nm Gate Poly Removal Process
During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...
Coordinate metrology and surface inspection techniques are integral to precision manufacturing, facilitating the accurate assessment of complex geometries and freeform surfaces. These methodologies ...
In order to detect defects in the surfaces of dry fabric and composite prepreg, this new vision-based tactile sensor roller prototype, TacRoller, is a three-colour reflective membrane roller-shape ...
X-ray and advanced automated techniques combine to create a capable tool for lead-free solder inspection needs. Within two years, solder used in electronics manufactured or sold in Europe must meet ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results