Abstract: Piezoelectric micromachined ultrasound transducers (PMUTs) and a high sensitivity PMUT-based gas flowmeter were designed, fabricated and characterised. In this work a single side measurement ...
Abstract: This letter presents a corrosion-resistant MEMS calorimetric flow sensor that addresses reliability challenges in ammonia (NH3) flow measurement. The employment of Parylene C anti-corrosion ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback