
EUV lithography systems – Products | ASML
EUV lithography is important because it makes scaling more affordable for chipmakers and allows the semiconductor industry to continue its pursuit of Moore’s Law. EUV systems are used to …
5 things you should know about High NA EUV lithography - ASML
Jan 25, 2024 · We’re bringing you the what, why and how behind the TWINSCAN EXE:5000, ASML’s latest extreme ultraviolet (EUV) lithography system.
TWINSCAN NXE:3600D - EUV lithography systems | ASML
The EUV lithography solutions provided by the TWINSCAN NXE:3600D are complementary to those provided by our TWINSCAN NXT systems based on ArF immersion technology.
Light & lasers - Lithography principles| ASML
EUV lithography, a technology entirely unique to ASML, uses light with a wavelength of 13.5 nanometers. This wavelength is more than 14 times shorter than DUV light.
TWINSCAN EXE:5200B – EUV lithography systems | ASML
The dual-stage extreme ultraviolet (EUV) lithography system is designed to support volume production of sub-2 nm Logic nodes and leading-edge DRAM nodes.
Making EUV: from lab to fab – Stories | ASML
Mar 30, 2022 · Lifting the lid on ASML’s collaborative journey to bring extreme ultraviolet (EUV) lithography technology to market.
TWINSCAN NXE:3400C – EUV lithography systems | ASML
Combining high productivity, excellent image resolution, matched overlay to EUV NXE and ArFi NXT tools and focus performance, the TWINSCAN NXE:3400C provides lithography capability …
TWINSCAN NXE:3800E – EUV lithography systems | ASML
TWINSCAN NXE:3800E The dual-stage extreme ultraviolet (EUV) system supports high-volume manufacturing of 2 nm Logic nodes and leading-edge DRAM nodes.
TWINSCAN EXE:5000 - EUV lithography systems | ASML
The dual-stage extreme ultraviolet (EUV) lithography system is the first in a new generation of machines that will provide 8 nm resolution to support advanced Logic and Memory chip …
ASML technology | Supplying the semiconductor industry
Jan 25, 2024 · The size of the features to be printed varies depending on the layer, which means that different types of lithography systems are used for different layers – from our latest …